IC Solutions maintains a variety of inventory spares at any time. Some are new stock, some are refurbished parts. This inventory changes continually, so please check with us often to see what we currently have available.

Image SKU Name Category Tool

ILLUMINATION AIR CONTROLLER

 		SERV.436.33473 ILLUMINATION AIR CONTROLLER Refurbished ASML 5500

ILLUMINATION AIR CONTROL 24V

 		SERV.436.33473 ILLUMINATION AIR CONTROL 24V New ASML 5500 Stepper

POWER AMP CONTROLLER BOARD

 		SERV.436.60994 POWER AMP CONTROLLER BOARD Spare ASML 5500 Stepper or Scanner

MOTION CONTROLLER BOARD

 		SERV.436.64672 MOTION CONTROLLER BOARD Spare ASML 5500 Stepper

RESET PANEL ASSY

 		SERV.436.65221 RESET PANEL ASSY Refurbished 5500 Stepper or Scanner

ALIGNMENT LASER WITH INTERLOCK

 		SERV.436.80012 ALIGNMENT LASER WITH INTERLOCK New ASML Scanner

SRC R83 BOARD

 		SERV.437.08893 SRC R83 BOARD New ASML 5500 Stepper

ENH.MOTION CONTROLLER PPCA

 		SERV.437.13125 ENH.MOTION CONTROLLER PPCA Spare ASML 5500 Stepper or Scanner

POWER AMPLIFIER PCA

 		SERV.437.30361 POWER AMPLIFIER PCA Refurbished Spare ASML 5500 Stepper

INTERFERENCE FILTER /60/80/100

 		SERV.454.15721 INTERFERENCE FILTER /60/80/100 New ASML 5500 Stepper
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