IC Solutions offers full support for ASML Airco Systems, plus a wide variety of semiconductor equipment,

equipment parts, sales and services.

Parts Services

  • Lithography Equipment Parts
  • Implant Equipment Parts
  • Etch Parts
  • CVD
  • Stocker Parts
  • CMP, Cleanup and other parts
  • Robots
  • Turbomolecular Pumps
  • Dry Pumps
  • RF Generators and Matching
  • DC Power Supplies
  • LCD Touch Panel Displays
  • Reticle Pods *NEW
  • RTP And Epitaxy

We also offer user used equipment

sales and relocation services